MIM unit structure and communication mechanism

January 29, 2022

MIM is a sandwich structure composed of a metal, insulator, and metal three-layer film. The MIM structure for liquid crystal display is shown in Figure 1, mainly

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There are two types: (1) Figure 1 (a) is a relatively common "T" shape structure. The process of this structure is relatively simple, and the MIM developed in the early stage is basically this form. However, the MIM area of this structure is relatively large and has a large parasitic

Capacitance is detrimental to improving contrast and improving display quality. If you want to reduce the area, you need a large area, high resolution

Lithographic equipment. Not only increases the difficulty of the production process, the yield rate decreases, but also increases the cost, and is not suitable for large scale.

display. (2) Figure 1 (b) shows the lateral MIM structure developed, which is formed laterally on the scan line.

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